Shadow-Mask Evaporation through Monolayer-Modified Nanostencils

Gradual clogging of the apertures of nanostencils used as miniature shadow masks in metal evaporations can be reduced by coating the stencil with self-assembled monolayers (SAM). This is quantified by the dimensions (height and volume) of gold features obtained by nanostencil evaporation as measured...

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Veröffentlicht in:	Nano letters 2002-12, Vol.2 (12), p.1339-1343
Hauptverfasser:	Kölbel, Marius, Tjerkstra, R. Willem, Brugger, Jürgen, van Rijn, Cees J. M, Nijdam, Wietze, Huskens, Jurriaan, Reinhoudt, David N
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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