Embossed Polymeric Relief Structures as a Template for the Growth of Periodic Inorganic Microstructures

A new method is presented for the glancing angle deposition (GLAD) of inorganic micro- and nanostructures using polymeric relief structures as seeding sites. Conventional embossing processes in thermoset resins are used to produce the relief structures, which potentially facilitates large scale prod...

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Veröffentlicht in:	Nano letters 2001-02, Vol.1 (2), p.71-73
Hauptverfasser:	Dick, B, Sit, J. C, Brett, M. J, Votte, I. M. N, Bastiaansen, C. W. M
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Cross-disciplinary physics: materials science rheology Electronics Exact sciences and technology Materials science Microelectronic fabrication (materials and surfaces technology) Nanoscale materials and structures: fabrication and characterization Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online-Zugang:	Volltext
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