Synthesis of Self-Assembled Island-Structured Complex Oxide Dielectric Films

A self-assembly driven process to synthesize island-structured dielectric films is presented. An intermetallic reaction in platinized silicon substrates provides preferential growth sites for the complex oxide dielectric layer. Microscopy and spectroscopy analyses have been used to propose a mechani...

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Veröffentlicht in:	Journal of physical chemistry. C 2009-09, Vol.113 (38), p.16610-16614
Hauptverfasser:	Sriram, Sharath, Bhaskaran, Madhu, Kostovski, Gorgi, Mitchell, David R. G, Stoddart, Paul R, Austin, Michael W, Mitchell, Arnan
Format:	Artikel
Sprache:	eng
Schlagworte:	C: Nanops and Nanostructures
Online-Zugang:	Volltext
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