Cool Copper Template for the Formation of Oriented Nanocrystalline α-Tantalum

Cool Copper Template for the Formation of Oriented Nanocrystalline α-Tantalum

Ta/Cu is a strategic material combination for ultra-large-scale integrated wafer technology. Here we report an unconventional method for the synthesis of a [110]-oriented nanocrystalline α-Ta thin film on freshly prepared Cu(111) templates at

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Veröffentlicht in:The journal of physical chemistry. B 2002-12, Vol.106 (48), p.12366-12368
Hauptverfasser: Yong, Clare, Zhang, Bei Chao, Seet, Chim Seng, See, Alex, Chan, Lap, Sudijono, John, Liew, San Leong, Tung, Chih-Hang, Zeng, Hua Chun
Format: Artikel
Sprache:eng
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Zusammenfassung:Ta/Cu is a strategic material combination for ultra-large-scale integrated wafer technology. Here we report an unconventional method for the synthesis of a [110]-oriented nanocrystalline α-Ta thin film on freshly prepared Cu(111) templates at
ISSN:1520-6106
1520-5207
DOI:10.1021/jp026668c