Metal Loaded Zeolite Adsorbents for Phosphine Removal

Phosphine (PH3) is a highly toxic air pollutant commonly used in the semiconductor and optoelectronic industries, but it has received less research attention due to its handling difficulty. In this study, metal (Cu, Zn, or Mn) loaded ZSM-5 and Y zeolite adsorbents are first prepared for the adsorpti...

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Veröffentlicht in:	Industrial & engineering chemistry research 2008-03, Vol.47 (5), p.1501-1505
Hauptverfasser:	Li, Wen-Chih, Bai, Hsunling, Hsu, Jung-Nan, Li, Shou-Nan, Chen, Chienchih
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Chemical engineering Exact sciences and technology
Online-Zugang:	Volltext
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