In Situ Monitoring of Atomic Layer Controlled Pore Reduction in Alumina Tubular Membranes Using Sequential Surface Reactions

The pore diameter in alumina tubular membranes with an initial diameter of 50 Å was systematically reduced using the atomic layer controlled deposition of Al2O3. The Al2O3 was deposited using sequential exposures of Al(CH3)3 (trimethylaluminum, TMA) and H2O in an ABAB... binary reaction sequence. Th...

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Veröffentlicht in:	Chemistry of Materials 1998-12, Vol.10 (12), p.3941-3950
Hauptverfasser:	Berland, B. S, Gartland, I. P, Ott, A. W, George, S. M
Format:	Artikel
Sprache:	eng
Schlagworte:	ALUMINIUM OXIDES ATOMS Chemistry Colloidal state and disperse state DEPOSITION Exact sciences and technology GAS FLOW General and physical chemistry MATERIALS SCIENCE MEMBRANES ORGANOMETALLIC COMPOUNDS PORE STRUCTURE
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