Fabrication and Characterization of Glassy Carbon MEMS

This paper describes the fabrication of free-standing high-carbon microstructures by soft-lithographic techniques; these structures ranged in complexity from simple beams to complex, suspended deflectors. Microstructures of polymeric precursors (copolymers of furfuryl alcohol−phenol) to high-carbon...

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Veröffentlicht in:	Chemistry of materials 1997-06, Vol.9 (6), p.1399-1406
Hauptverfasser:	Schueller, Olivier J. A, Brittain, Scott T, Marzolin, Christian, Whitesides, G. M
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Chemical modifications Exact sciences and technology Inorganic and organomineral polymers Physicochemistry of polymers
Online-Zugang:	Volltext
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