Preparation and Characterization of Lead Zirconate Thin Films by Chemical Solution Deposition

Lead zirconate (PbZrO3) thin films were grown on platinum-coated silicon substrates by a chemical solution deposition. The precursor solution for spin-coating was prepared from lead acetate trihydrate and zirconium oxynitrate dihydrate as starting materials and 2-methoxyethanol as solvent; the pervo...

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Veröffentlicht in:	Chemistry of materials 2002-05, Vol.14 (5), p.2129-2133
Hauptverfasser:	Tang, X. G, Ding, A. L, Ye, Y, Chan, H. L. W
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Liquid phase epitaxy deposition from liquid phases (melts, solutions, and surface layers on liquids) Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Structure and morphology thickness Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
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