Electron-Beam-Assisted Oxygen Purification at Low Temperatures for Electron-Beam-Induced Pt Deposits: Towards Pure and High-Fidelity Nanostructures

Nanoscale metal deposits written directly by electron-beam-induced deposition, or EBID, are typically contaminated because of the incomplete removal of the original organometallic precursor. This has greatly limited the applicability of EBID materials synthesis, constraining the otherwise powerful d...

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Veröffentlicht in:	ACS applied materials & interfaces 2014-01, Vol.6 (2), p.1018-1024
Hauptverfasser:	Plank, Harald, Noh, Joo Hyon, Fowlkes, Jason D, Lester, Kevin, Lewis, Brett B, Rack, Philip D
Format:	Artikel
Sprache:	eng
Schlagworte:	Carbon - chemistry Electrons Metals - chemistry Nanostructures - chemistry Nanotechnology Oxygen - chemistry Oxygen - isolation & purification Platinum - chemistry Surface Properties Temperature
Online-Zugang:	Volltext
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