Electron-Beam-Assisted Oxygen Purification at Low Temperatures for Electron-Beam-Induced Pt Deposits: Towards Pure and High-Fidelity Nanostructures

Nanoscale metal deposits written directly by electron-beam-induced deposition, or EBID, are typically contaminated because of the incomplete removal of the original organometallic precursor. This has greatly limited the applicability of EBID materials synthesis, constraining the otherwise powerful d...

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Veröffentlicht in:ACS applied materials & interfaces 2014-01, Vol.6 (2), p.1018-1024
Hauptverfasser: Plank, Harald, Noh, Joo Hyon, Fowlkes, Jason D, Lester, Kevin, Lewis, Brett B, Rack, Philip D
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container_issue 2
container_start_page 1018
container_title ACS applied materials & interfaces
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creator Plank, Harald
Noh, Joo Hyon
Fowlkes, Jason D
Lester, Kevin
Lewis, Brett B
Rack, Philip D
description Nanoscale metal deposits written directly by electron-beam-induced deposition, or EBID, are typically contaminated because of the incomplete removal of the original organometallic precursor. This has greatly limited the applicability of EBID materials synthesis, constraining the otherwise powerful direct-write synthesis paradigm. We demonstrate a low-temperature purification method in which platinum–carbon nanostructures deposited from MeCpPtIVMe3 are purified by the presence of oxygen gas during a post-electron exposure treatment. Deposit thickness, oxygen pressure, and oxygen temperature studies suggest that the dominant mechanism is the electron-stimulated reaction of oxygen molecules adsorbed at the defective deposit surface. Notably, pure platinum deposits with low resistivity and retain the original deposit fidelity were accomplished at an oxygen temperature of only 50 °C.
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subjects Carbon - chemistry
Electrons
Metals - chemistry
Nanostructures - chemistry
Nanotechnology
Oxygen - chemistry
Oxygen - isolation & purification
Platinum - chemistry
Surface Properties
Temperature
title Electron-Beam-Assisted Oxygen Purification at Low Temperatures for Electron-Beam-Induced Pt Deposits: Towards Pure and High-Fidelity Nanostructures
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