Nanoporous AlGaN Distributed Bragg Reflectors for Deep Ultraviolet Emission

In this paper, we demonstrated wafer-scale AlGaN-based deep ultraviolet (DUV) nanoporous (NP) distributed Bragg reflectors (DBRs) by vertical electrochemical (EC) etching. The stopbands of the NP-DBRs were centered around 280 nm with reflectance close to 90%. A thick AlGaN film and four-period multi...

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Veröffentlicht in:	ACS applied nano materials 2022-07, Vol.5 (7), p.10081-10089
Hauptverfasser:	Shan, Maocheng, Guo, Chenyu, Zhao, Yongming, Chen, Qiushuang, Deng, Liqiong, Zheng, Zhihua, Tan, Shizhou, Guo, Wei, Dai, Jiangnan, Wu, Feng, Li, Xiaohang, Chen, Changqing
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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