Anisotropic In-Plane Conductivity and Dichroic Gold Plasmon Resonance in Plasma-Assisted ITO Thin Films e‑Beam-Evaporated at Oblique Angles

ITO thin films have been prepared by electron beam evaporation at oblique angles (OA), directly and while assisting their growth with a downstream plasma. The films microstructure, characterized by scanning electron microscopy, atomic force microscopy, and glancing incidence small-angle X-ray scatte...

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Veröffentlicht in:	ACS applied materials & interfaces 2015-05, Vol.7 (20), p.10993-11001
Hauptverfasser:	Parra-Barranco, Julián, García-García, Francisco J, Rico, Víctor, Borrás, Ana, López-Santos, Carmen, Frutos, Fabián, Barranco, Angel, González-Elipe, Agustín R
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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