Investigations on the Crystallographic Orientation Induced Surface Morphology Evolution of ZnO Thin Films and Their Wettability and Conductivity

The intrinsic zinc oxide (ZnO) thin films with controllable crystallographic orientation have been synthesized on Si(100) substrates using plasma-enhanced chemical vapor deposition (PECVD) system without any buffer layer. Based on X-ray diffraction (XRD) results, the evolution of crystallographic or...

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Veröffentlicht in:Journal of physical chemistry. C 2016-04, Vol.120 (15), p.8210-8219
Hauptverfasser: Chao, Chung-Hua, Chi, Po-Wei, Wei, Da-Hua
Format: Artikel
Sprache:eng
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