Cross calibration of secondary ion mass spectrometers

It is known from previous round-robin experiments that relative sensitivity factors, obtained on identical samples by different SIMS instruments, frequently disagree by a factor of up to 50. A method is suggested for cross-calibrating instruments in such a way that relative elemental sensitivity fac...

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Veröffentlicht in:Anal. Chem.; (United States) 1985-07, Vol.57 (8), p.1636-1643
Hauptverfasser: Ruedenauer, Friedrich, Steiger, Wolfgang, Riedel, Miklos, Beske, Horst E, Holzbrecher, Horst, Gericke, Michael, Richter, Carl Ernst, Rieth, Michael, Trapp, Manfred, et al, .
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container_end_page 1643
container_issue 8
container_start_page 1636
container_title Anal. Chem.; (United States)
container_volume 57
creator Ruedenauer, Friedrich
Steiger, Wolfgang
Riedel, Miklos
Beske, Horst E
Holzbrecher, Horst
Gericke, Michael
Richter, Carl Ernst
Rieth, Michael
Trapp, Manfred
et al, .
description It is known from previous round-robin experiments that relative sensitivity factors, obtained on identical samples by different SIMS instruments, frequently disagree by a factor of up to 50. A method is suggested for cross-calibrating instruments in such a way that relative elemental sensitivity factors determined on one SIMS instrument may be used on another instrument for quantification of unknown samples. The method consists in actively tuning the operating parameters of instruments in such a way that relative sensitivity factors for B and W (with respect to Fe) in a homogeneous B/sub 15/Fe/sub 75/W/sub 10/ metallic glass sample (primary calibration standard, PCS) are in close agreement on all participating instruments. In an experimental in which this cross-calibration strategy has been adopted, relative sensitivity factors of seven further elements, determined on seven different SIMS instruments (including ion microscopes, ion microprobes, and quadrupole-SIMS), agree within a factor of the order of 1.7. Improvements may be expected with better tuning to the PCS. 11 references, 3 figures, 8 tables.
doi_str_mv 10.1021/ac00285a030
format Article
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Chem.; (United States)</title><addtitle>Anal. Chem</addtitle><description>It is known from previous round-robin experiments that relative sensitivity factors, obtained on identical samples by different SIMS instruments, frequently disagree by a factor of up to 50. A method is suggested for cross-calibrating instruments in such a way that relative elemental sensitivity factors determined on one SIMS instrument may be used on another instrument for quantification of unknown samples. The method consists in actively tuning the operating parameters of instruments in such a way that relative sensitivity factors for B and W (with respect to Fe) in a homogeneous B/sub 15/Fe/sub 75/W/sub 10/ metallic glass sample (primary calibration standard, PCS) are in close agreement on all participating instruments. In an experimental in which this cross-calibration strategy has been adopted, relative sensitivity factors of seven further elements, determined on seven different SIMS instruments (including ion microscopes, ion microprobes, and quadrupole-SIMS), agree within a factor of the order of 1.7. Improvements may be expected with better tuning to the PCS. 11 references, 3 figures, 8 tables.</description><subject>400104 - Spectral Procedures- (-1987)</subject><subject>BORON</subject><subject>CALIBRATION</subject><subject>CALIBRATION STANDARDS</subject><subject>Catalysis</subject><subject>Catalysts: preparations and properties</subject><subject>Catalytic reactions</subject><subject>CHEMICAL ANALYSIS</subject><subject>Chemistry</subject><subject>CHROMIUM</subject><subject>DATA</subject><subject>ELEMENTS</subject><subject>Exact sciences and technology</subject><subject>EXPERIMENTAL DATA</subject><subject>General and physical chemistry</subject><subject>General. 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In an experimental in which this cross-calibration strategy has been adopted, relative sensitivity factors of seven further elements, determined on seven different SIMS instruments (including ion microscopes, ion microprobes, and quadrupole-SIMS), agree within a factor of the order of 1.7. Improvements may be expected with better tuning to the PCS. 11 references, 3 figures, 8 tables.</abstract><cop>Washington, DC</cop><pub>American Chemical Society</pub><doi>10.1021/ac00285a030</doi><tpages>8</tpages></addata></record>
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identifier ISSN: 0003-2700
ispartof Anal. Chem.; (United States), 1985-07, Vol.57 (8), p.1636-1643
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1520-6882
language eng
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source ACS Publications
subjects 400104 - Spectral Procedures- (-1987)
BORON
CALIBRATION
CALIBRATION STANDARDS
Catalysis
Catalysts: preparations and properties
Catalytic reactions
CHEMICAL ANALYSIS
Chemistry
CHROMIUM
DATA
ELEMENTS
Exact sciences and technology
EXPERIMENTAL DATA
General and physical chemistry
General. Nomenclature, chemical documentation, computer chemistry
GLASS
INFORMATION
INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY
ION MICROPROBE ANALYSIS
IRON
MASS SPECTROMETERS
MASS SPECTROSCOPY
MEASURING INSTRUMENTS
METALS
MICROANALYSIS
NICKEL
NIOBIUM
NONDESTRUCTIVE ANALYSIS
NUMERICAL DATA
QUANTITATIVE CHEMICAL ANALYSIS
SEMIMETALS
SENSITIVITY
SPECTROMETERS
SPECTROSCOPY
TANTALUM
Theory of reactions, general kinetics
Theory of reactions, general kinetics. Catalysis. Nomenclature, chemical documentation, computer chemistry
TRANSITION ELEMENTS
TUNGSTEN
VANADIUM
ZIRCONIUM
title Cross calibration of secondary ion mass spectrometers
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