EUV ablation of organic polymers at a high fluence

A preliminary investigation on short-wavelength ablation mechanisms of poly(methyl methacrylate)(PMMA) and poly(1,4-phenylene ether ether-sulfone)(PPEES) by extreme ultraviolet(EUV) radiation at 13.5 nm using a table-top laserproduced plasma from a gas-puff target at LLG(Gttingen) and at 46.9 nm by...

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Veröffentlicht in:	High power laser science and engineering 2014-07, Vol.2 (3), p.86-90, Article e26
Hauptverfasser:	Liberatore, Chiara, Mann, Klaus, Müller, Matthias, Pina, Ladislav, Juha, Libor, Rocca, Jorge J., Endo, Akira, Mocek, Tomas
Format:	Artikel
Sprache:	eng
Schlagworte:	ablation effect EUV mechanisms organic photo-erosion polymer wavelength
Online-Zugang:	Volltext
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