Development of a planar ICP ion source for fusion based neutron generator

In this paper preliminary results of a new planar ICP ion source for neutron generator is investigated. This ion source has a cylindrical planar Aluminum plasma chamber. Set of Niobium permanent magnets have been arranged as multicusp geometry around the chamber to improve the plasma density and reduce the operational pressure. A copper made helical antenna has been used which is connected to the 2 kW 13.56 MHz radiofrequency power source including matching network. Preliminary results of ion beam measurements using 1 and 3 mm diameter apertures on plasma electrodes, represents improvement of ion current from μA range to mA with Helium operational gas. A primary result with Deuterium gas indicates that the ion current improves up to 7 mA by applying multicusp magnetic field around the plasma chamber at similar operational parameters with 1 kW of RF power. Theoretical and experiments are performed to regulate the optimum distance between plasma and the accelerating electrodes to have parallel deuteron ion beam at around 65 kV electrical potential between them. Accelerating electrode configuration which suppresses the secondary electron generated on the target surface is designed and fabricated based on the simulation results.