Design improvements for a linear hybrid step micro-actuator

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Veröffentlicht in:	Microsystem technologies 2006-06, Vol.12 (7), p.646-649
Hauptverfasser:	HAHN, M, GEHRKING, R, PONICK, B, GATZEN, H. H
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Physics Precision engineering, watch making Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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