One-step microfabrication of fused silica by laser ablation of an organic solution

One-step microfabrication of fused silica by laser ablation of an organic solution

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Veröffentlicht in:Applied physics. A, Materials science & processing Materials science & processing, 1999, Vol.68 (1), p.111-113
Hauptverfasser: WANG, J, NIINO, H, YABE, A
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Sprache:eng
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Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Physics
Surface cleaning, etching, patterning
Surface treatments
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container_title Applied physics. A, Materials science & processing
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creator WANG, J
NIINO, H
YABE, A
description
doi_str_mv 10.1007/s003390050863
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ispartof Applied physics. A, Materials science & processing, 1999, Vol.68 (1), p.111-113
issn 0947-8396
1432-0630
language eng
recordid cdi_crossref_primary_10_1007_s003390050863
source Springer journals
subjects Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Physics
Surface cleaning, etching, patterning
Surface treatments
title One-step microfabrication of fused silica by laser ablation of an organic solution
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