Basic studies of gallium nitride growth on sapphire by metalorganic chemical vapor deposition and optical properties of deposited layers

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Veröffentlicht in:Journal of electronic materials 1995-11, Vol.24 (11), p.1531-1534
Hauptverfasser: NIEBUHR, R, BACHEM, K, DOMBROWSKI, K, MAIER, M, PLETSCHEN, W, KAUFMANN, U
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container_title Journal of electronic materials
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creator NIEBUHR, R
BACHEM, K
DOMBROWSKI, K
MAIER, M
PLETSCHEN, W
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description
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ispartof Journal of electronic materials, 1995-11, Vol.24 (11), p.1531-1534
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language eng
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source SpringerNature Journals
subjects Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Iii-v semiconductors
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Photoluminescence
Physics
title Basic studies of gallium nitride growth on sapphire by metalorganic chemical vapor deposition and optical properties of deposited layers
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