Atmospheric and low pressure metalorganic vapor phase epitaxial growth of vertical quantum wells and quantum well wires on submicron gratings

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Veröffentlicht in:Journal of electronic materials 1994-02, Vol.23 (2), p.121-124
Hauptverfasser: VERMEIRE, G, MOERMAN, I, YU, Z. Q, VERMAERKE, F, VAN DAELE, P, DEMEESTER, P
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source Springer Nature - Complete Springer Journals
subjects Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Vapor phase epitaxy
growth from vapor phase
title Atmospheric and low pressure metalorganic vapor phase epitaxial growth of vertical quantum wells and quantum well wires on submicron gratings
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