Low thermal budget solid phase epitaxial growth of CaF2 On Si (111) substrates

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Veröffentlicht in:	Journal of electronic materials 1990-10, Vol.19 (10), p.1061-1064
Hauptverfasser:	SINGH, R, THAKUR, R. P. S, NELSON, A. J, GEBHARD, S. C, SWARTZLANDER, A. B
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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source	SpringerLink Journals - AutoHoldings
subjects	Applied sciences Electronics Exact sciences and technology Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
title	Low thermal budget solid phase epitaxial growth of CaF2 On Si (111) substrates
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