Simultaneous SIMS/AES Measurements for the Characterization of Multilayer Systems
Gespeichert in:
| Veröffentlicht in: | Mikrochimica acta (1966) 1987-01, Vol.91 (1-6), p.347-353 |
|---|---|
| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 353 |
|---|---|
| container_issue | 1-6 |
| container_start_page | 347 |
| container_title | Mikrochimica acta (1966) |
| container_volume | 91 |
| creator | Ma eli, K. Burbach, J. Kassing, R. Kulisch, W. Niew hner, L. |
| description | |
| doi_str_mv | 10.1007/BF01199510 |
| format | Article |
| fullrecord | <record><control><sourceid>crossref</sourceid><recordid>TN_cdi_crossref_primary_10_1007_BF01199510</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>10_1007_BF01199510</sourcerecordid><originalsourceid>FETCH-LOGICAL-c105t-8629a9db99cfa78aaaf172d5248f2fdb6b92f280e43c563b667eeddc691a5fd13</originalsourceid><addsrcrecordid>eNpFkEFLwzAYQIMoOKcXf0HOQt2XpE2a4xybDlZEqufyNf3CKusqSXqYv15FwdM7vXd4jN0KuBcAZvGwASGsLQScsZnIlc4KMOqczQCkzpQ28pJdxfgOIIyW-Yy91P0wHRIeaZwir7dVvViua14RxinQQMcUuR8DT3viqz0GdIlC_4mpH4989Lz6lvsDnijw-hQTDfGaXXg8RLr545y9bdavq6ds9_y4XS13mRNQpKzU0qLtWmudR1MiohdGdoXMSy991-rWSi9LoFy5QqtWa0PUdU5bgYXvhJqzu9-uC2OMgXzzEfoBw6kR0PzMaP5nqC_-nFKF</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Simultaneous SIMS/AES Measurements for the Characterization of Multilayer Systems</title><source>SpringerLink Journals</source><creator>Ma eli, K. ; Burbach, J. ; Kassing, R. ; Kulisch, W. ; Niew hner, L.</creator><creatorcontrib>Ma eli, K. ; Burbach, J. ; Kassing, R. ; Kulisch, W. ; Niew hner, L.</creatorcontrib><identifier>ISSN: 0026-3672</identifier><identifier>EISSN: 1436-5073</identifier><identifier>DOI: 10.1007/BF01199510</identifier><language>eng</language><ispartof>Mikrochimica acta (1966), 1987-01, Vol.91 (1-6), p.347-353</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c105t-8629a9db99cfa78aaaf172d5248f2fdb6b92f280e43c563b667eeddc691a5fd13</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,27903,27904</link.rule.ids></links><search><creatorcontrib>Ma eli, K.</creatorcontrib><creatorcontrib>Burbach, J.</creatorcontrib><creatorcontrib>Kassing, R.</creatorcontrib><creatorcontrib>Kulisch, W.</creatorcontrib><creatorcontrib>Niew hner, L.</creatorcontrib><title>Simultaneous SIMS/AES Measurements for the Characterization of Multilayer Systems</title><title>Mikrochimica acta (1966)</title><issn>0026-3672</issn><issn>1436-5073</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1987</creationdate><recordtype>article</recordtype><recordid>eNpFkEFLwzAYQIMoOKcXf0HOQt2XpE2a4xybDlZEqufyNf3CKusqSXqYv15FwdM7vXd4jN0KuBcAZvGwASGsLQScsZnIlc4KMOqczQCkzpQ28pJdxfgOIIyW-Yy91P0wHRIeaZwir7dVvViua14RxinQQMcUuR8DT3viqz0GdIlC_4mpH4989Lz6lvsDnijw-hQTDfGaXXg8RLr545y9bdavq6ds9_y4XS13mRNQpKzU0qLtWmudR1MiohdGdoXMSy991-rWSi9LoFy5QqtWa0PUdU5bgYXvhJqzu9-uC2OMgXzzEfoBw6kR0PzMaP5nqC_-nFKF</recordid><startdate>198701</startdate><enddate>198701</enddate><creator>Ma eli, K.</creator><creator>Burbach, J.</creator><creator>Kassing, R.</creator><creator>Kulisch, W.</creator><creator>Niew hner, L.</creator><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>198701</creationdate><title>Simultaneous SIMS/AES Measurements for the Characterization of Multilayer Systems</title><author>Ma eli, K. ; Burbach, J. ; Kassing, R. ; Kulisch, W. ; Niew hner, L.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c105t-8629a9db99cfa78aaaf172d5248f2fdb6b92f280e43c563b667eeddc691a5fd13</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1987</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Ma eli, K.</creatorcontrib><creatorcontrib>Burbach, J.</creatorcontrib><creatorcontrib>Kassing, R.</creatorcontrib><creatorcontrib>Kulisch, W.</creatorcontrib><creatorcontrib>Niew hner, L.</creatorcontrib><collection>CrossRef</collection><jtitle>Mikrochimica acta (1966)</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Ma eli, K.</au><au>Burbach, J.</au><au>Kassing, R.</au><au>Kulisch, W.</au><au>Niew hner, L.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Simultaneous SIMS/AES Measurements for the Characterization of Multilayer Systems</atitle><jtitle>Mikrochimica acta (1966)</jtitle><date>1987-01</date><risdate>1987</risdate><volume>91</volume><issue>1-6</issue><spage>347</spage><epage>353</epage><pages>347-353</pages><issn>0026-3672</issn><eissn>1436-5073</eissn><doi>10.1007/BF01199510</doi><tpages>7</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0026-3672 |
| ispartof | Mikrochimica acta (1966), 1987-01, Vol.91 (1-6), p.347-353 |
| issn | 0026-3672 1436-5073 |
| language | eng |
| recordid | cdi_crossref_primary_10_1007_BF01199510 |
| source | SpringerLink Journals |
| title | Simultaneous SIMS/AES Measurements for the Characterization of Multilayer Systems |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-26T14%3A53%3A54IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-crossref&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Simultaneous%20SIMS/AES%20Measurements%20for%20the%20Characterization%20of%20Multilayer%20Systems&rft.jtitle=Mikrochimica%20acta%20(1966)&rft.au=Ma%20eli,%20K.&rft.date=1987-01&rft.volume=91&rft.issue=1-6&rft.spage=347&rft.epage=353&rft.pages=347-353&rft.issn=0026-3672&rft.eissn=1436-5073&rft_id=info:doi/10.1007/BF01199510&rft_dat=%3Ccrossref%3E10_1007_BF01199510%3C/crossref%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |