Some features of the electrical forming of MDM systems based on silicon oxynitride films

Some features of the electrical forming of MDM systems based on silicon oxynitride films

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Veröffentlicht in:Soviet Physics Journal 1976-05, Vol.19 (5), p.602-605
Hauptverfasser: Burdovitsin, V. A., Galanskii, B. L., Smirnova, K. I., Yankelevich, Yu. B.
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container_end_page 605
container_issue 5
container_start_page 602
container_title Soviet Physics Journal
container_volume 19
creator Burdovitsin, V. A.
Galanskii, B. L.
Smirnova, K. I.
Yankelevich, Yu. B.
description
doi_str_mv 10.1007/BF00952560
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title Some features of the electrical forming of MDM systems based on silicon oxynitride films
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