Investigation of the diffusion of phosphorus through a film of SiO2 by the radioactive tracer method

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Veröffentlicht in:Soviet Physics Journal 1976-05, Vol.19 (5), p.566-571
Hauptverfasser: Goncharov, E. E., Lifirenko, V. D., Makarov, N. M., Ryabova, G. G.
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container_end_page 571
container_issue 5
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container_title Soviet Physics Journal
container_volume 19
creator Goncharov, E. E.
Lifirenko, V. D.
Makarov, N. M.
Ryabova, G. G.
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title Investigation of the diffusion of phosphorus through a film of SiO2 by the radioactive tracer method
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