Dielectric properties of supermultilayer films based on silicon and germanium oxides

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Veröffentlicht in:	Soviet Physics Journal 1975-10, Vol.18 (10), p.1473-1475
Hauptverfasser:	Pankov, Yu. D., Kamin, V. A., Pestov, Yu. V., Andreev, S. S.
Format:	Artikel
Sprache:	eng
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title	Dielectric properties of supermultilayer films based on silicon and germanium oxides
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