Diagnostics of liquid technological media of microelectronics by IR spectroscopy and spectrometry
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| Veröffentlicht in: | Journal of applied spectroscopy 1991-09, Vol.55 (3), p.850-854 |
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| Format: | Artikel |
| Sprache: | eng |
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| container_end_page | 854 |
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| container_issue | 3 |
| container_start_page | 850 |
| container_title | Journal of applied spectroscopy |
| container_volume | 55 |
| creator | Barakaev, A. Kh Glushkov, S. M. Panchishin, I. M. |
| description | |
| doi_str_mv | 10.1007/BF00662408 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 0021-9037 |
| ispartof | Journal of applied spectroscopy, 1991-09, Vol.55 (3), p.850-854 |
| issn | 0021-9037 1573-8647 |
| language | eng |
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| source | SpringerLink Journals - AutoHoldings |
| title | Diagnostics of liquid technological media of microelectronics by IR spectroscopy and spectrometry |
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