Aluminium diffusion in titanium nitride films. Efficiency of TiN barrier layers
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| Veröffentlicht in: | Applied Physics A Solids and Surfaces 1993-08, Vol.57 (2), p.195-197 |
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| container_end_page | 197 |
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| container_issue | 2 |
| container_start_page | 195 |
| container_title | Applied Physics A Solids and Surfaces |
| container_volume | 57 |
| creator | GRIGOROV, G. I GRIGOROV, K. G STOYANOVA, M VIGNES, J. L LANGERON, J. P DENJEAN, P |
| description | |
| doi_str_mv | 10.1007/BF00331444 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 0721-7250 |
| ispartof | Applied Physics A Solids and Surfaces, 1993-08, Vol.57 (2), p.195-197 |
| issn | 0721-7250 1432-0630 |
| language | eng |
| recordid | cdi_crossref_primary_10_1007_BF00331444 |
| source | SpringerLink Journals - AutoHoldings |
| subjects | Chemical interdiffusion diffusion barriers Condensed matter: structure, mechanical and thermal properties Diffusion in solids Exact sciences and technology Physics Transport properties of condensed matter (nonelectronic) |
| title | Aluminium diffusion in titanium nitride films. Efficiency of TiN barrier layers |
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