Nanolithography: Small 23/2009
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Veröffentlicht in: | Small (Weinheim an der Bergstrasse, Germany) Germany), 2009-12, Vol.5 (23), p.n/a |
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container_title | Small (Weinheim an der Bergstrasse, Germany) |
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creator | Hakala, Tommi K. Linko, Veikko Eskelinen, Antti-Pekka Toppari, J. Jussi Kuzyk, Anton Törmä, Päivi |
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doi_str_mv | 10.1002/smll.200990111 |
format | Article |
fullrecord | <record><control><sourceid>istex_cross</sourceid><recordid>TN_cdi_crossref_primary_10_1002_smll_200990111</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>ark_67375_WNG_TZMXQ07S_P</sourcerecordid><originalsourceid>FETCH-LOGICAL-c1171-8216f6c1c46bf57acbd28aaf3e7a07ff733bfb96fea9a9d012f61dc649066b003</originalsourceid><addsrcrecordid>eNo9jzFPwzAUhC0EEqWwMqL-gaTv2akds6EKClIpoBaBWKwXJ6YBh1R2B_rvaVSU6W64O93H2CVCigB8HBvvUw6gNSDiERugRJHInOvj3iOcsrMYvwAE8kwN2NWCflpfb9ftZ6DNenc9Wjbk_YiLcTd1zk4c-Vhd_OuQvd7drqb3yfxp9jC9mScWUWGSc5ROWrSZLNxEkS1KnhM5USkC5ZwSonCFlq4iTboE5E5iaWWmQcpif2bI0sOuDW2MoXJmE-qGws4gmI7OdHSmp9sXkkOhjtvqt09T-DZSCTUxb4uZWX08vr-AWppn8Qfoq1BM</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Nanolithography: Small 23/2009</title><source>Wiley Online Library Journals Frontfile Complete</source><creator>Hakala, Tommi K. ; Linko, Veikko ; Eskelinen, Antti-Pekka ; Toppari, J. Jussi ; Kuzyk, Anton ; Törmä, Päivi</creator><creatorcontrib>Hakala, Tommi K. ; Linko, Veikko ; Eskelinen, Antti-Pekka ; Toppari, J. Jussi ; Kuzyk, Anton ; Törmä, Päivi</creatorcontrib><identifier>ISSN: 1613-6810</identifier><identifier>EISSN: 1613-6829</identifier><identifier>DOI: 10.1002/smll.200990111</identifier><language>eng</language><publisher>Weinheim: WILEY-VCH Verlag</publisher><ispartof>Small (Weinheim an der Bergstrasse, Germany), 2009-12, Vol.5 (23), p.n/a</ispartof><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,27901,27902</link.rule.ids></links><search><creatorcontrib>Hakala, Tommi K.</creatorcontrib><creatorcontrib>Linko, Veikko</creatorcontrib><creatorcontrib>Eskelinen, Antti-Pekka</creatorcontrib><creatorcontrib>Toppari, J. Jussi</creatorcontrib><creatorcontrib>Kuzyk, Anton</creatorcontrib><creatorcontrib>Törmä, Päivi</creatorcontrib><title>Nanolithography: Small 23/2009</title><title>Small (Weinheim an der Bergstrasse, Germany)</title><addtitle>Small</addtitle><issn>1613-6810</issn><issn>1613-6829</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2009</creationdate><recordtype>article</recordtype><recordid>eNo9jzFPwzAUhC0EEqWwMqL-gaTv2akds6EKClIpoBaBWKwXJ6YBh1R2B_rvaVSU6W64O93H2CVCigB8HBvvUw6gNSDiERugRJHInOvj3iOcsrMYvwAE8kwN2NWCflpfb9ftZ6DNenc9Wjbk_YiLcTd1zk4c-Vhd_OuQvd7drqb3yfxp9jC9mScWUWGSc5ROWrSZLNxEkS1KnhM5USkC5ZwSonCFlq4iTboE5E5iaWWmQcpif2bI0sOuDW2MoXJmE-qGws4gmI7OdHSmp9sXkkOhjtvqt09T-DZSCTUxb4uZWX08vr-AWppn8Qfoq1BM</recordid><startdate>20091204</startdate><enddate>20091204</enddate><creator>Hakala, Tommi K.</creator><creator>Linko, Veikko</creator><creator>Eskelinen, Antti-Pekka</creator><creator>Toppari, J. Jussi</creator><creator>Kuzyk, Anton</creator><creator>Törmä, Päivi</creator><general>WILEY-VCH Verlag</general><scope>BSCLL</scope><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20091204</creationdate><title>Nanolithography: Small 23/2009</title><author>Hakala, Tommi K. ; Linko, Veikko ; Eskelinen, Antti-Pekka ; Toppari, J. Jussi ; Kuzyk, Anton ; Törmä, Päivi</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c1171-8216f6c1c46bf57acbd28aaf3e7a07ff733bfb96fea9a9d012f61dc649066b003</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2009</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Hakala, Tommi K.</creatorcontrib><creatorcontrib>Linko, Veikko</creatorcontrib><creatorcontrib>Eskelinen, Antti-Pekka</creatorcontrib><creatorcontrib>Toppari, J. Jussi</creatorcontrib><creatorcontrib>Kuzyk, Anton</creatorcontrib><creatorcontrib>Törmä, Päivi</creatorcontrib><collection>Istex</collection><collection>CrossRef</collection><jtitle>Small (Weinheim an der Bergstrasse, Germany)</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Hakala, Tommi K.</au><au>Linko, Veikko</au><au>Eskelinen, Antti-Pekka</au><au>Toppari, J. Jussi</au><au>Kuzyk, Anton</au><au>Törmä, Päivi</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Nanolithography: Small 23/2009</atitle><jtitle>Small (Weinheim an der Bergstrasse, Germany)</jtitle><addtitle>Small</addtitle><date>2009-12-04</date><risdate>2009</risdate><volume>5</volume><issue>23</issue><epage>n/a</epage><issn>1613-6810</issn><eissn>1613-6829</eissn><cop>Weinheim</cop><pub>WILEY-VCH Verlag</pub><doi>10.1002/smll.200990111</doi><oa>free_for_read</oa></addata></record> |
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source | Wiley Online Library Journals Frontfile Complete |
title | Nanolithography: Small 23/2009 |
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