Edge effects and image contrast in scanning Auger microscopy: A theory/experiment comparison

The contribution of surface roughness to the artefacts present in images and line‐scans from Scanning Auger Microscopes have been explored by Monte Carlo modelling and by experiment. The samples chosen for these studies are metal lines with sharp rectangular cross‐sections deposited upon silicon sub...

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Veröffentlicht in:	Surface and interface analysis 1988-03, Vol.11 (5), p.251-265
Hauptverfasser:	El Gomati, M. M., Prutton, M., Lamb, B., Tuppen, C. G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Analytical chemistry Chemistry Exact sciences and technology Spectrometric and optical methods
Online-Zugang:	Volltext
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