62‐1: Distinguished Student Paper: Ultraviolet Photodetectors and Readout Based on a‐IGZO Semiconductor Technology

In this work real‐time ultraviolet photodetectors are realized through metal‐semiconductor‐metal (MSM) structures. Amorphous indium gallium zinc oxide (a‐IGZO) is used as semiconductor material and gold as metal electrodes. The readout of an individual sensor is implemented by a transimpedance ampli...

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Veröffentlicht in:SID International Symposium Digest of technical papers 2023-06, Vol.54 (1), p.880-883
Hauptverfasser: Schellander, Yannick, Winter, Marius, Schamber, Maurice, Munkes, Fabian, Schalberger, Patrick, Kuebler, Harald, Pfau, Tilman, Fruehauf, Norbert
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container_title SID International Symposium Digest of technical papers
container_volume 54
creator Schellander, Yannick
Winter, Marius
Schamber, Maurice
Munkes, Fabian
Schalberger, Patrick
Kuebler, Harald
Pfau, Tilman
Fruehauf, Norbert
description In this work real‐time ultraviolet photodetectors are realized through metal‐semiconductor‐metal (MSM) structures. Amorphous indium gallium zinc oxide (a‐IGZO) is used as semiconductor material and gold as metal electrodes. The readout of an individual sensor is implemented by a transimpedance amplifier (TIA) consisting of an allenhancement a‐IGZO thin film transistor (TFT) operational amplifier and a switched capacitor (SC) as feedback resistance. The photosensor and the transimpedance amplifier are both manufactured on glass substrates. The measured photosensor possesses a high responsivity R, a low response time t RES and a good noise equivalent power value NEP.
doi_str_mv 10.1002/sdtp.16705
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title 62‐1: Distinguished Student Paper: Ultraviolet Photodetectors and Readout Based on a‐IGZO Semiconductor Technology
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