High-speed operation of scanning electron microscope lenses

The speed at which the focal properties of an iron‐shrouded magnetic electron lens can be changed is fundamentally limited by Eddy currents in the magnetic material. The effects of such Eddy currents on the lens properties can be partially compensated by modifying the lens excitation to speed up the...

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Bibliographische Detailangaben

Veröffentlicht in:	Scanning 1997-06, Vol.19 (4), p.275-280
Hauptverfasser:	Thong, J. T. L., Li, F.
Format:	Artikel
Sprache:	eng
Schlagworte:	Eddy currents transient excitation of magnetic lens
Online-Zugang:	Volltext
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