Morphology evolution and optical properties of GaN nano-pyramids grown by selective area MOVPE

The evolution of GaN nano‐pyramid growth by selective area metalorganic vapor phase epitaxy (SA‐MOVPE) on GaN/c‐plane sapphire templates with extremely low pattern fill factor and large inter‐hole spacing was studied with scanning electron microscopy (SEM). The optical nanostructure characteristics...

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Veröffentlicht in:Physica status solidi. C 2012-03, Vol.9 (3-4), p.624-627
Hauptverfasser: Winden, Andreas, Mikulics, Martin, Haab, Anna, Stoica, Toma, von der Ahe, Martina, Wirtz, Konrad, Hardtdegen, Hilde, Grützmacher, Detlev
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container_issue 3-4
container_start_page 624
container_title Physica status solidi. C
container_volume 9
creator Winden, Andreas
Mikulics, Martin
Haab, Anna
Stoica, Toma
von der Ahe, Martina
Wirtz, Konrad
Hardtdegen, Hilde
Grützmacher, Detlev
description The evolution of GaN nano‐pyramid growth by selective area metalorganic vapor phase epitaxy (SA‐MOVPE) on GaN/c‐plane sapphire templates with extremely low pattern fill factor and large inter‐hole spacing was studied with scanning electron microscopy (SEM). The optical nanostructure characteristics were investigated by micro‐photoluminescence spectroscopy at room temperature. It was found that sub‐100 nm structures can be fabricated by controlling the growth time and mask opening size. Single nanostructures exhibit more intense luminescence and a red shift of the band edge transition compared to the GaN layer. (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
doi_str_mv 10.1002/pssc.201100411
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source Wiley Online Library Journals Frontfile Complete
subjects GaN
micro-photoluminescence
MOVPE
nano-pyramids
selective area growth
strain
title Morphology evolution and optical properties of GaN nano-pyramids grown by selective area MOVPE
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