Early Stages of Pore Formation on Si During Etching in HF Solutions

The fabrication of porous silicon (PS) with controlled pore size distributions is of importance for reproducible manufacturing as well as it may help to elucidate the origin of light emission from this material. The pore formation on p‐doped Si(111) surfaces is studied. For this purpose hydrogen pas...

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Veröffentlicht in:	Physica status solidi. B. Basic research 1995-07, Vol.190 (1), p.21-25
Hauptverfasser:	Zur Mühlen, E., Niehus, H.
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemistry Colloidal state and disperse state Exact sciences and technology General and physical chemistry Porous materials
Online-Zugang:	Volltext
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