Defects in a nitrogen-implanted ZnO thin film

Defects in a nitrogen implanted and thermally annealed zinc oxide thin film (n‐type conducting) and reference samples were studied. Space charge regions realised by fabrication of semitransparent palladium Schottky contacts enabled the application of capacitance spectroscopic methods and photo ‐ cur...

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Veröffentlicht in:	Physica status solidi. B. Basic research 2010-05, Vol.247 (5), p.1220-1226
Hauptverfasser:	Schmidt, Matthias, Ellguth, Martin, Schmidt, Florian, Lüder, Thomas, Wenckstern, Holger v., Pickenhain, Rainer, Grundmann, Marius, Brauer, Gerhard, Skorupa, Wolfgang
Format:	Artikel
Sprache:	eng
Schlagworte:	capacitance Condensed matter: electronic structure, electrical, magnetic, and optical properties deep level defects Electron states Electron states and collective excitations in thin films, multilayers, quantum wells, mesoscopic and nanoscale systems Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Exact sciences and technology Ii-vi semiconductors Impurity and defect levels ion implantation Physics Thin films and multilayers ZnO
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