Some features of chemical interaction between a fast diffusing impurity and a group VI element in silicon

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Veröffentlicht in:	Physica status solidi. A, Applied research Applied research, 1994-04, Vol.142 (2), p.339-346
Hauptverfasser:	Bakhadirkhanov, M. K., Askarov, Sh. I., Norkulov, N.
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Sprache:	ger
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title	Some features of chemical interaction between a fast diffusing impurity and a group VI element in silicon
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