Hydrogen-Containing Amorphous Carbon Layers as Optical Materials in the Near-IR Spectral Range

Hydrogenated amorphous carbon layers were deposited on various substrates by means of a plasma CVD process with a RF substrate bias as well as an ECR plasma source. The optical properties of the a‐C:H layers were obtained via spectroscopic ellipsometry and correlated with their mechanical and chemic...

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Veröffentlicht in:	Plasma processes and polymers 2007-04, Vol.4 (S1), p.S76-S82
Hauptverfasser:	Hertwig, Andreas, Krüger, Jörg, Weise, Matthias, Beck, Uwe
Format:	Artikel
Sprache:	eng
Schlagworte:	amorphous diamond-like carbon hydrocarbons laser ablation optical properties structure
Online-Zugang:	Volltext
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