Structural control of oligomeric methyl silsesquioxane precursors and their thin-film properties

Oligomeric methyl silsesquioxane (O‐MSSQ) precursors were prepared from methyl trimethoxysilane (MTMS) in a mixed solvent of methyl isobutyl ketone and tetrahydrofuran by variations in the pH and molar ratio of water to MTMS (R1). The molecular structures of O‐MSSQ were controlled by the reaction co...

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Veröffentlicht in:	Journal of polymer science. Part A, Polymer chemistry Polymer chemistry, 2002-05, Vol.40 (10), p.1560-1571
Hauptverfasser:	Lee, Long-Hua, Chen, Wen-Chang, Liu, Wei-Chih
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences curing of polymers dielectric properties Exact sciences and technology Inorganic and organomineral polymers oligomers Physicochemistry of polymers polysiloxanes Preparation thin films
Online-Zugang:	Volltext
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