Investigations on Plasma Assisted Surface Cleaning of Aluminum in an Oxygen Glow Discharge

Aluminum plates which are contaminated with hydrocarbon containing compounds (oil, grease) were treated in an Ar‐, O2‐ and Ar/O2‐plasma generated by a dc‐discharge. Besides a variation of the macroscopic discharge parameters (power, pressure) also different modes (anomalous glow regime, hollow catho...

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Veröffentlicht in:	Contributions to plasma physics (1988) 1994, Vol.34 (4), p.563-574
Hauptverfasser:	Kersten, H., Behnke, J. F., Eggs, C.
Format:	Artikel
Sprache:	eng
Schlagworte:	Cross-disciplinary physics: materials science rheology Electric discharges Exact sciences and technology Glow corona Materials science Other topics in materials science Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges
Online-Zugang:	Volltext
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