Pressure Dependence of the Mean Electron Energy in the Bulk Plasma of an RF Discharge in Argon

The pressure dependence of the mean electron energy 〈ϵ〉 was investigated in discharges in Ar experimentally by sampling the plasma potential with an ion mass spectrometer, and theoretically by solving the electron Boltzmann equation for the bulk plasma. Both results show a decrease in 〈ϵ〉 with incre...

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Veröffentlicht in:	Contributions to plasma physics (1988) 1992, Vol.32 (6), p.613-622
Hauptverfasser:	Seeböck, R. J., Köhler, W. E., Römheld, M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Electric discharges Exact sciences and technology Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges
Online-Zugang:	Volltext
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