A comparison of control architectures for atomic force microscopes

We evaluate the performance of two control architectures applied to atomic force microscopes (AFM). Feedback‐only control is a natural solution and has been applied widely. Expanding on that, combining feedback controllers with plant‐injection feedforward filters has been shown to greatly improve tr...

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Veröffentlicht in:	Asian journal of control 2009-03, Vol.11 (2), p.175-181
Hauptverfasser:	Butterworth, J. A., Pao, L. Y., Abramovitch, D. Y.
Format:	Artikel
Sprache:	eng
Schlagworte:	Atomic force microscope feedforward control
Online-Zugang:	Volltext
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