Preparation of positive photoreactive polyimides and their characterization

Preparation of positive photoreactive polyimides and their characterization

Polyimide precursors were synthesized from a diamine and a diacid chloride that was derived from the reactant with promellitic dianhydride and o‐nitrobenzyl alcohol. Their thermal properties were studied in nitrogen using dynamic thermogravimetry, and the photoreaction mechanism was investigated by...

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Veröffentlicht in:Journal of applied polymer science 1987-04, Vol.33 (5), p.1763-1775
Hauptverfasser: Kubota, Shigeru, Moriwaki, Toshimoto, Ando, Torahiko, Fukami, Akira
Format: Artikel
Sprache:eng
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Applied sciences
Exact sciences and technology
Physical properties
Polymer industry, paints, wood
Properties and testing
Radiation influence
Technology of polymers
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container_end_page 1775
container_issue 5
container_start_page 1763
container_title Journal of applied polymer science
container_volume 33
creator Kubota, Shigeru
Moriwaki, Toshimoto
Ando, Torahiko
Fukami, Akira
description Polyimide precursors were synthesized from a diamine and a diacid chloride that was derived from the reactant with promellitic dianhydride and o‐nitrobenzyl alcohol. Their thermal properties were studied in nitrogen using dynamic thermogravimetry, and the photoreaction mechanism was investigated by ultraviolet and infrared spectrophotometry. The polyimide precursors were spin‐coated onto silicon wafers, prebaked, and then exposed to UV light from a high pressure Hg–Xe lamp. When the films were dipped into 2% aqueous KOH after irradiation, the exposed area dissolved forming high resolution patterns. Relative sensitivities of the polymers were determined.
doi_str_mv 10.1002/app.1987.070330528
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subjects Applied sciences
Exact sciences and technology
Physical properties
Polymer industry, paints, wood
Properties and testing
Radiation influence
Technology of polymers
title Preparation of positive photoreactive polyimides and their characterization
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