Ultra‐Precision Processing of Conductive Materials via Electrorheological Fluid‐Assisted Polishing

Ultra‐precision polishing of conductive components of novel electronic and optical devices at small scales is of paramount importance for achieving desired product performance and quality. Herein, the feasibility and performance of the electrorheological fluid‐assisted polishing (ERFP) approach in p...

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Veröffentlicht in:	Advanced engineering materials 2021-03, Vol.23 (3), p.n/a
Hauptverfasser:	Zhao, Yunwei, Liu, Xiaomin, Fang, Yuhui, Cao, Changyong
Format:	Artikel
Sprache:	eng
Schlagworte:	conductive materials electrorheological fluids material removal polishing ultra-precision processing
Online-Zugang:	Volltext
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