Design and performance of a test rig for evaluation of nanopositioning stages

Nanopositioning stages are used in many areas of nanotechnology and advanced materials analysis, often being integrated into analytical devices such as scanning probe and optical microscopes and manufacturing devices (e.g. lithographic systems). We present a metrological instrument, together with so...

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Veröffentlicht in:	Measurement science & technology 2019-03, Vol.30 (3), p.35002
Hauptverfasser:	Yacoot, Andrew, Klapetek, Petr, Valtr, Miroslav, Grolich, Petr, Dongmo, Herve, Lazzerini, Giovanni M, Bridges, Angus
Format:	Artikel
Sprache:	eng
Schlagworte:	dimensional metrology multi-axis positioning stages nanopositioning traceability
Online-Zugang:	Volltext
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