Cost-effective processing of a piezoresistive MEMS cantilever sensor

Cost-effective processing of a piezoresistive MEMS cantilever sensor

In this paper cost-effective methods for fabrication of a piezoresistive cantilever sensor for industrial use are focused. The intended use of the presented cantilever is a medical application. A closer description of the cantilever design is given. The low-cost processing sequence is presented and...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Clausen, Ingelin, Moe, Sigurd T, Vogl, Andreas
Format: Buch
Sprache:eng
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator Clausen, Ingelin
Moe, Sigurd T
Vogl, Andreas
description In this paper cost-effective methods for fabrication of a piezoresistive cantilever sensor for industrial use are focused. The intended use of the presented cantilever is a medical application. A closer description of the cantilever design is given. The low-cost processing sequence is presented and each processing step is explained in detail. Results from electrical probing and mechanical strength test are given. The results demonstrate that the chosen low-cost processing route results in high yield and a mechanical robust device.
format Book
fullrecord <record><control><sourceid>cristin_3HK</sourceid><recordid>TN_cdi_cristin_nora_11250_2431457</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>11250_2431457</sourcerecordid><originalsourceid>FETCH-cristin_nora_11250_24314573</originalsourceid><addsrcrecordid>eNrjZHBxzi8u0U1NS0tNLsksS1UoKMpPTi0uzsxLV8hPU0hUKMhMrcovSi3OLAZL-7r6BiskJ-aVZOaklqUWKRSn5hXnF_EwsKYl5hSn8kJpbgZFN9cQZw_d5CKQvrz4vPyixHhDQyNTg3gjE2NDE1NzY2LUAAC9CTKT</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>book</recordtype></control><display><type>book</type><title>Cost-effective processing of a piezoresistive MEMS cantilever sensor</title><source>NORA - Norwegian Open Research Archives</source><creator>Clausen, Ingelin ; Moe, Sigurd T ; Vogl, Andreas</creator><creatorcontrib>Clausen, Ingelin ; Moe, Sigurd T ; Vogl, Andreas</creatorcontrib><description>In this paper cost-effective methods for fabrication of a piezoresistive cantilever sensor for industrial use are focused. The intended use of the presented cantilever is a medical application. A closer description of the cantilever design is given. The low-cost processing sequence is presented and each processing step is explained in detail. Results from electrical probing and mechanical strength test are given. The results demonstrate that the chosen low-cost processing route results in high yield and a mechanical robust device.</description><language>eng</language><ispartof>MME 2011: Proceedings of the 22nd Micromechanics and microsystems technology Europe workshop: 19-22 June 2011 Tønsberg, Norway, 2011</ispartof><rights>info:eu-repo/semantics/openAccess</rights><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>230,307,776,881,4034,26544</link.rule.ids><linktorsrc>$$Uhttp://hdl.handle.net/11250/2431457$$EView_record_in_NORA$$FView_record_in_$$GNORA$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Clausen, Ingelin</creatorcontrib><creatorcontrib>Moe, Sigurd T</creatorcontrib><creatorcontrib>Vogl, Andreas</creatorcontrib><title>Cost-effective processing of a piezoresistive MEMS cantilever sensor</title><title>MME 2011: Proceedings of the 22nd Micromechanics and microsystems technology Europe workshop: 19-22 June 2011 Tønsberg, Norway</title><description>In this paper cost-effective methods for fabrication of a piezoresistive cantilever sensor for industrial use are focused. The intended use of the presented cantilever is a medical application. A closer description of the cantilever design is given. The low-cost processing sequence is presented and each processing step is explained in detail. Results from electrical probing and mechanical strength test are given. The results demonstrate that the chosen low-cost processing route results in high yield and a mechanical robust device.</description><fulltext>true</fulltext><rsrctype>book</rsrctype><creationdate>2011</creationdate><recordtype>book</recordtype><sourceid>3HK</sourceid><recordid>eNrjZHBxzi8u0U1NS0tNLsksS1UoKMpPTi0uzsxLV8hPU0hUKMhMrcovSi3OLAZL-7r6BiskJ-aVZOaklqUWKRSn5hXnF_EwsKYl5hSn8kJpbgZFN9cQZw_d5CKQvrz4vPyixHhDQyNTg3gjE2NDE1NzY2LUAAC9CTKT</recordid><startdate>2011</startdate><enddate>2011</enddate><creator>Clausen, Ingelin</creator><creator>Moe, Sigurd T</creator><creator>Vogl, Andreas</creator><scope>3HK</scope></search><sort><creationdate>2011</creationdate><title>Cost-effective processing of a piezoresistive MEMS cantilever sensor</title><author>Clausen, Ingelin ; Moe, Sigurd T ; Vogl, Andreas</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-cristin_nora_11250_24314573</frbrgroupid><rsrctype>books</rsrctype><prefilter>books</prefilter><language>eng</language><creationdate>2011</creationdate><toplevel>online_resources</toplevel><creatorcontrib>Clausen, Ingelin</creatorcontrib><creatorcontrib>Moe, Sigurd T</creatorcontrib><creatorcontrib>Vogl, Andreas</creatorcontrib><collection>NORA - Norwegian Open Research Archives</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Clausen, Ingelin</au><au>Moe, Sigurd T</au><au>Vogl, Andreas</au><format>book</format><genre>book</genre><ristype>BOOK</ristype><atitle>Cost-effective processing of a piezoresistive MEMS cantilever sensor</atitle><btitle>MME 2011: Proceedings of the 22nd Micromechanics and microsystems technology Europe workshop: 19-22 June 2011 Tønsberg, Norway</btitle><date>2011</date><risdate>2011</risdate><abstract>In this paper cost-effective methods for fabrication of a piezoresistive cantilever sensor for industrial use are focused. The intended use of the presented cantilever is a medical application. A closer description of the cantilever design is given. The low-cost processing sequence is presented and each processing step is explained in detail. Results from electrical probing and mechanical strength test are given. The results demonstrate that the chosen low-cost processing route results in high yield and a mechanical robust device.</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof MME 2011: Proceedings of the 22nd Micromechanics and microsystems technology Europe workshop: 19-22 June 2011 Tønsberg, Norway, 2011
issn
language eng
recordid cdi_cristin_nora_11250_2431457
source NORA - Norwegian Open Research Archives
title Cost-effective processing of a piezoresistive MEMS cantilever sensor
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-02T23%3A37%3A25IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-cristin_3HK&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=book&rft.atitle=Cost-effective%20processing%20of%20a%20piezoresistive%20MEMS%20cantilever%20sensor&rft.btitle=MME%202011:%20Proceedings%20of%20the%2022nd%20Micromechanics%20and%20microsystems%20technology%20Europe%20workshop:%2019-22%20June%202011%20T%C3%B8nsberg,%20Norway&rft.au=Clausen,%20Ingelin&rft.date=2011&rft_id=info:doi/&rft_dat=%3Ccristin_3HK%3E11250_2431457%3C/cristin_3HK%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true