Fabrication and Characterization of Single Doped GaAs Nanowire Devices
In the work with this master thesis, electron beam lithography (EBL) and other cleanroom methods was used to develop a reproducible process for making ohmic contactsto nanowires (NWs), with the aim of investigating different dopants influence ontheir physical properties. After optimizing the EBL pro...
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Format: | Dissertation |
Sprache: | eng |
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