Fabrication and Characterization of Single Doped GaAs Nanowire Devices

In the work with this master thesis, electron beam lithography (EBL) and other cleanroom methods was used to develop a reproducible process for making ohmic contactsto nanowires (NWs), with the aim of investigating different dopants influence ontheir physical properties. After optimizing the EBL pro...

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Bibliographische Detailangaben
1. Verfasser: Nordeng, Mikael Johannes
Format: Dissertation
Sprache:eng
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