Optical properties of titanium oxide films obtained by cathodic arc plasma deposition
Structural and optical properties of nanometric titanium oxide（TixOy） films obtained by cathodic arc plasma deposition were investigated. Phase analysis by x-ray diffraction and Fouriertransform infrared spectroscopy showed the presence of anatase, rutile, Ti_2O_3, Ti_4O_7 and amorphous phases. Scan...
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| Veröffentlicht in: | Plasma science & technology 2017-12, Vol.19 (12), p.111-118 |
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| creator | JOKANOVI, Vukoman OLOVI, Bo ana TRAJKOVSKA PETKOSKA, Anka MRAKOVI, Ana JOKANOVI, Bojan NENADOVI, Miloš FERRARA, Manuela NASOV, Ilija |
| description | Structural and optical properties of nanometric titanium oxide（TixOy） films obtained by cathodic arc plasma deposition were investigated. Phase analysis by x-ray diffraction and Fouriertransform infrared spectroscopy showed the presence of anatase, rutile, Ti_2O_3, Ti_4O_7 and amorphous phases. Scanning electron microscopy images showed well-developed surface morphology with nano-patterns. Spectroscopic ellipsometry revealed film thicknesses of 53 and50 nm, variable refractive indices dependent on the light wavelength and close to zero extinction coefficients for wavelengths higher than 500 nm. On the basis of ultraviolet–visible spectroscopy data and using the Tauc equation, band gap values for direct and indirect electron transitions were determined. |
| doi_str_mv | 10.1088/2058-6272/aa8806 |
| format | Article |
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Phase analysis by x-ray diffraction and Fouriertransform infrared spectroscopy showed the presence of anatase, rutile, Ti_2O_3, Ti_4O_7 and amorphous phases. Scanning electron microscopy images showed well-developed surface morphology with nano-patterns. Spectroscopic ellipsometry revealed film thicknesses of 53 and50 nm, variable refractive indices dependent on the light wavelength and close to zero extinction coefficients for wavelengths higher than 500 nm. On the basis of ultraviolet–visible spectroscopy data and using the Tauc equation, band gap values for direct and indirect electron transitions were determined.</description><subject>ellipsometry</subject><subject>optical materials</subject><subject>plasma deposition</subject><subject>thin films</subject><issn>1009-0630</issn><issn>1009-0630</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2017</creationdate><recordtype>article</recordtype><recordid>eNp9kM1LAzEQxRdRsFbvHoMnD66dSfYje5TiFxR6qeeQTbJtyu4mblKw_71bWsSDCAMzDO8Nb35JcovwiMD5jELO04KWdCYl51CcJRMEqFIoGJz_mi-TqxC2AHlWcTZJPpY-WiVb4gfnzRCtCcQ1JNooe7vriPuy2pDGtt24r6O0vdGk3hMl48Zpq4gcFPGtDJ0k2ngXbLSuv04uGtkGc3Pq02T18ryav6WL5ev7_GmRKpZBTAs0GeU1IpWaZ6Y2um5QYl2UUDOJWCFFmTFNM2pUCUrynJWYl8X4sKE1myZwPKsGF8JgGuEH28lhLxDEgYo4UBEHKuJIZbQ8HC3WebF1u6Ef8_0nv_9D7kMUWAmkY-U5ZMLrZpTencJsXL_-tP36J01RZqyCHJF9Ay4rfGU</recordid><startdate>20171201</startdate><enddate>20171201</enddate><creator>JOKANOVI, Vukoman</creator><creator>OLOVI, Bo ana</creator><creator>TRAJKOVSKA PETKOSKA, Anka</creator><creator>MRAKOVI, Ana</creator><creator>JOKANOVI, Bojan</creator><creator>NENADOVI, Miloš</creator><creator>FERRARA, Manuela</creator><creator>NASOV, Ilija</creator><general>IOP Publishing</general><scope>2RA</scope><scope>92L</scope><scope>CQIGP</scope><scope>W92</scope><scope>~WA</scope><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20171201</creationdate><title>Optical properties of titanium oxide films obtained by cathodic arc plasma deposition</title><author>JOKANOVI, Vukoman ; OLOVI, Bo ana ; TRAJKOVSKA PETKOSKA, Anka ; MRAKOVI, Ana ; JOKANOVI, Bojan ; NENADOVI, Miloš ; FERRARA, Manuela ; NASOV, Ilija</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c340t-61e428b112ad84ebedbf1a1b670b3a119121a43d242ec70ca85371576088e2b3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2017</creationdate><topic>ellipsometry</topic><topic>optical materials</topic><topic>plasma deposition</topic><topic>thin films</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>JOKANOVI, Vukoman</creatorcontrib><creatorcontrib>OLOVI, Bo ana</creatorcontrib><creatorcontrib>TRAJKOVSKA PETKOSKA, Anka</creatorcontrib><creatorcontrib>MRAKOVI, Ana</creatorcontrib><creatorcontrib>JOKANOVI, Bojan</creatorcontrib><creatorcontrib>NENADOVI, Miloš</creatorcontrib><creatorcontrib>FERRARA, Manuela</creatorcontrib><creatorcontrib>NASOV, Ilija</creatorcontrib><collection>中文科技期刊数据库</collection><collection>中文科技期刊数据库-CALIS站点</collection><collection>中文科技期刊数据库-7.0平台</collection><collection>中文科技期刊数据库-工程技术</collection><collection>中文科技期刊数据库- 镜像站点</collection><collection>CrossRef</collection><jtitle>Plasma science & technology</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>JOKANOVI, Vukoman</au><au>OLOVI, Bo ana</au><au>TRAJKOVSKA PETKOSKA, Anka</au><au>MRAKOVI, Ana</au><au>JOKANOVI, Bojan</au><au>NENADOVI, Miloš</au><au>FERRARA, Manuela</au><au>NASOV, Ilija</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Optical properties of titanium oxide films obtained by cathodic arc plasma deposition</atitle><jtitle>Plasma science & technology</jtitle><stitle>PST</stitle><addtitle>Plasma Science ＆ Technology</addtitle><date>2017-12-01</date><risdate>2017</risdate><volume>19</volume><issue>12</issue><spage>111</spage><epage>118</epage><pages>111-118</pages><issn>1009-0630</issn><eissn>1009-0630</eissn><coden>PSTHC3</coden><abstract>Structural and optical properties of nanometric titanium oxide（TixOy） films obtained by cathodic arc plasma deposition were investigated. Phase analysis by x-ray diffraction and Fouriertransform infrared spectroscopy showed the presence of anatase, rutile, Ti_2O_3, Ti_4O_7 and amorphous phases. Scanning electron microscopy images showed well-developed surface morphology with nano-patterns. Spectroscopic ellipsometry revealed film thicknesses of 53 and50 nm, variable refractive indices dependent on the light wavelength and close to zero extinction coefficients for wavelengths higher than 500 nm. On the basis of ultraviolet–visible spectroscopy data and using the Tauc equation, band gap values for direct and indirect electron transitions were determined.</abstract><pub>IOP Publishing</pub><doi>10.1088/2058-6272/aa8806</doi><tpages>8</tpages></addata></record> |
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| subjects | ellipsometry optical materials plasma deposition thin films |
| title | Optical properties of titanium oxide films obtained by cathodic arc plasma deposition |
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