Carrier transport characteristics of H-terminated diamond films prepared using molecular hydrogen and atomic hydrogen

The H-terminated diamond films, which exhibit high surface conductivity, have been used in high-frequency and high-power electronic devices. In this paper, the surface conductive channel on specimens from the same diamond film was obtained by hydrogen plasma treatment and by heating under a hydrogen...

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Veröffentlicht in:	矿物冶金与材料学报：英文版 2017, Vol.24 (7), p.850-856
1. Verfasser:	Jin-long Liu Liang-xian Chen Yu-ting Zheng Jing-jing Wang Zhi-hong Feng Cheng-ming Li
Format:	Artikel
Sprache:	eng
Schlagworte:	氢分子 氢原子 氢等离子体处理 氢终止 载流子密度 载流子迁移率 输运特性 金刚石薄膜
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