Sub-micrometer-thick ,and low-loss Ge20Sb5Se65 rib waveguides for nonlinear optical devices

Sub-micrometer-thick ,and low-loss Ge20Sb5Se65 rib waveguides for nonlinear optical devices

We report the fabrication and optical properties of sub-micrometer-thick Ge20Sb15Se65 chalcogenide rib waveguides. The radio-frequency （R.F） magnetron sputtering method is used to deposit 0.83 lain-thick films. A protective layer of SU-8 is employed to prevent the attack of the alkaline developer, a...

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Veröffentlicht in:光电子快报：英文版 2015 (3), p.203-206
1. Verfasser: 李军 陈芬 沈祥 戴世勋 徐铁峰 聂秋华
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Sprache:eng
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亚微米
低损耗
光学性质
反应离子蚀刻
波导
磁控溅射法
肋
非线性光学器件
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creator 李军 陈芬 沈祥 戴世勋 徐铁峰 聂秋华
description We report the fabrication and optical properties of sub-micrometer-thick Ge20Sb15Se65 chalcogenide rib waveguides. The radio-frequency （R.F） magnetron sputtering method is used to deposit 0.83 lain-thick films. A protective layer of SU-8 is employed to prevent the attack of the alkaline developer, and CHF3 is used as the etching plasma for reactive ion etching （RIE）. Finally, the resulted rib waveguides with smooth sidewalls and vertical pattern profiles are rendered. The propagation losses for 4 pan-wide waveguides are measured to be 0.7 dB/cm for transverse electric （TE） modes and 0.68 dB/em for transverse magnetic （TM） modes at 1 550 nm via the cutback method.
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subjects 亚微米
低损耗
光学性质
反应离子蚀刻
波导
磁控溅射法
肋
非线性光学器件
title Sub-micrometer-thick ,and low-loss Ge20Sb5Se65 rib waveguides for nonlinear optical devices
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