Optical study of Ba（MnxTi1-x）O3） thin films by spectroscopic ellipsometry

Optical study of Ba（MnxTi1-x）O3） thin films by spectroscopic ellipsometry

Stoichiometric Ba（MnxTi（1-x）O3） （BMT） thin films with various values of x were deposited on Si（111） substrates by the sol-gel technique. The influence of Mn content on the optical properties was studied by spectroscopic ellipsometry （SE） in the UV–Vis–NIR region. By fitting the measured ellipsometri...

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Veröffentlicht in:中国物理B：英文版 2013 (11), p.589-593
1. Verfasser: 张婷 殷江 丁玲红 张伟风
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Sprache:eng
Schlagworte:
BMT
n含量
Si（111）衬底
光学性能
凝胶技术
化学计量
椭圆偏振光谱
薄膜
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description Stoichiometric Ba（MnxTi（1-x）O3） （BMT） thin films with various values of x were deposited on Si（111） substrates by the sol-gel technique. The influence of Mn content on the optical properties was studied by spectroscopic ellipsometry （SE） in the UV–Vis–NIR region. By fitting the measured ellipsometric parameter （Ψ and Δ） with a four-phase model （air/BMT＋voids/BMT/Si（111））, the key optical constants of the thin films have been obtained. It was found that the refractive index n and the extinction coefficient k increase with increasing Mn content due to the increase in the packing density. Furthermore, a strong dependence of the optical band gap Eg on Mn/Ti ratios in the deposited films was observed, and it was inferred that the energy level of conduction bands decreases with increasing Mn content.
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Furthermore, a strong dependence of the optical band gap Eg on Mn/Ti ratios in the deposited films was observed, and it was inferred that the energy level of conduction bands decreases with increasing Mn content.</description><identifier>ISSN: 1674-1056</identifier><identifier>EISSN: 2058-3834</identifier><language>eng</language><subject>BMT ; n含量 ; Si（111）衬底 ; 光学性能 ; 凝胶技术 ; 化学计量 ; 椭圆偏振光谱 ; 薄膜</subject><ispartof>中国物理B：英文版, 2013 (11), p.589-593</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Uhttp://image.cqvip.com/vip1000/qk/85823A/85823A.jpg</thumbnail><link.rule.ids>314,776,780,4010</link.rule.ids></links><search><creatorcontrib>张婷 殷江 丁玲红 张伟风</creatorcontrib><title>Optical study of Ba（MnxTi1-x）O3） thin films by spectroscopic ellipsometry</title><title>中国物理B：英文版</title><addtitle>Chinese Physics</addtitle><description>Stoichiometric Ba（MnxTi（1-x）O3） （BMT） thin films with various values of x were deposited on Si（111） substrates by the sol-gel technique. 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subjects BMT
n含量
Si（111）衬底
光学性能
凝胶技术
化学计量
椭圆偏振光谱
薄膜
title Optical study of Ba（MnxTi1-x）O3） thin films by spectroscopic ellipsometry
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