双靶磁控溅射沉积Cu-W薄膜组织结构特征及其演变

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Veröffentlicht in:	中国有色金属学报：英文版 2012, Vol.22 (11), p.2700-2706
1. Verfasser:	周灵平汪明朴彭坤朱家俊傅臻李周
Format:	Artikel
Sprache:	eng
Schlagworte:	Cu-W薄膜 Vegard规则固溶度层状结构溅射沉积非晶相
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source	Access via ScienceDirect (Elsevier); Alma/SFX Local Collection
subjects	Cu-W薄膜 Vegard规则固溶度层状结构溅射沉积非晶相
title	双靶磁控溅射沉积Cu-W薄膜组织结构特征及其演变
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